Ubwino wa cylindrical ndi planar magnetron sputtering chandamale

Katswiri waukadaulo wa RSM adzagawana nanu zabwino za cylindrical ndi planar magnetron sputtering targets?Poyerekeza ndi zolinga zina magnetron sputtering, cylindrical ndi planar magnetron sputtering chandamale kusunga ubwino ❖ kuyanika yunifolomu wa mipherezero amakona anayi planar, ndipo akhoza kukulitsa ntchito mipherezero mwa njira ziwiri zotsatirazi:

(1) Pamene magulu awiri (anayi) a maenje annular pamwamba pa chandamale kufika mozama, chandamale pachimake (maginito mbali) akhoza zimayenda 45 ° wachibale kwa chandamale chubu, kuti madera ena pa chandamale chubu. zomwe sizinawonongeke zingagwiritsidwe ntchito;

(2) Pamene chandamale pachimake cha cylindrical ndi planar magnetron sputtering chandamale lakonzedwa ngati kasinthasintha chandamale pachimake (chandamale pachimake ndi pozungulira pa sputtering), pamwamba chandamale akhoza wogawana sputtered kuchoka wosanjikiza ndi wosanjikiza popanda maenje.Panthawiyi, cholingacho chidzagwiritsidwa ntchito bwino kwambiri, ndipo chiwerengero chogwiritsira ntchito chandamale chikhoza kufika 50% ~ 60% Pamene zinthu zomwe zikugwiritsidwa ntchito ndizitsulo zamtengo wapatali, izi ndizofunika kwambiri.

Pogwiritsa ntchito mfundo ya maginito ndi pole nsapato mu coaxial cylindrical magnetron sputtering chandamale kuthetsa vuto la mapeto maginito, ndi makongoletsedwe ndege chandamale akhoza kusandulika cylindrical ndi planar magnetron sputtering chandamale, chandamale akhoza kukulitsa mlingo magwiritsidwe ntchito chandamale. ndikusunga ❖ kuyanika kwabwino kwa ndege ya makona atatu Kuti mupititse patsogolo phindu lazachuma.