Makhalidwe a ultra high purity aluminium sputtering targets

M'zaka zaposachedwa, ndi kupita patsogolo kwa ukadaulo wophatikizika (IC), ntchito zofananira zamagawo ophatikizika zidapangidwa mwachangu.Kopitilira muyeso mkulu chiyero zotayidwa aloyi sputtering chandamale, monga zinthu zothandizira popanga Integrated dera zitsulo interconnects, wakhala nkhani yotentha mu kafukufuku zapakhomo posachedwapa.mkonzi wa RSM adzatiwonetsa mikhalidwe ya kuyeretsedwa kwakukulu kwa aluminiyamu alloy sputtering target.

Pofuna kupititsa patsogolo mphamvu ya sputtering ya magnetron sputtering chandamale ndikuwonetsetsa kuti mafilimu omwe aikidwa, ambiri akuyesera akuwonetsa kuti pali zofunikira zina za kapangidwe kake, microstructure ndi tirigu wa ultra-high purity aluminium alloy sputtering chandamale.

Kukula kwambewu ndi momwe chimakhalira chandamale zimakhudzidwa kwambiri ndikukonzekera komanso mawonekedwe a makanema a IC.Zotsatira zikuwonetsa kuti kuchuluka kwa ma deposition kumachepa ndi kukula kwambewu;Kwa chandamale cha sputtering chokhala ndi mawonekedwe omwewo, kuchuluka kwa sputtering kwa chandamale ndi timbewu tating'onoting'ono kumathamanga kuposa chandamale ndi kukula kwakukulu kwambewu;Kukula kofananako kwa mbewu zomwe mukufuna kuchita, kumapangitsanso kugawa kwamitundu yofananira kwamakanema osungidwa.

Pansi pa zida zomwezo za sputtering ndi magawo opangira, kutsekemera kwa chandamale cha Al Cu alloy kumawonjezeka ndi kuchuluka kwa kachulukidwe ka atomiki, koma nthawi zambiri imakhala yokhazikika.Zotsatira za kukula kwa tirigu pamlingo wa sputtering ndi chifukwa cha kusintha kwa kachulukidwe ka atomiki ndi kusintha kwa kukula kwambewu;Mlingo woyika umakhudzidwa makamaka ndi momwe chimanga cha Al Cu alloy target.Pamaziko owonetsetsa kuti kuchuluka kwa (200) ndege zamakristali, kuwonjezeka kwa gawo la (111), (220) ndi (311) ndege zamakristali zidzakulitsa kuchuluka kwa magalasi.

Kukula kwambewu ndi kapangidwe kambewu ka ultra-high purity aluminium alloy alloy amasinthidwa ndikuwongoleredwa ndi ingot homogenization, ntchito yotentha ndi recrystallization annealing.Ndi kukula kwa kabati kakang'ono kufika pa 20.32cm (8in) ndi 30.48cm (12in), kukula kwa chandamale kukukulirakuliranso, zomwe zimayika patsogolo zofunikira za ultra-high purity aluminium alloy sputtering targets.Pofuna kuwonetsetsa kuti filimuyo ndi yabwino komanso zokolola, magawo omwe akuwongolera ayenera kuyang'aniridwa mosamalitsa kuti chandamale cha microstructure yunifolomu ndipo mawonekedwe ambewu ayenera kukhala ndi mawonekedwe amphamvu (200) ndi (220) ndege.