Kafukufuku watsopano mu nyuzipepala ya Diamond and Related Equipment imayang'ana kwambiri kuyika kwa diamondi ya polycrystalline yokhala ndi FeCoB etchant kuti ipange mapatani.Chifukwa cha luso laukadaulo lotsogola, malo a diamondi amatha kupezeka popanda kuwonongeka komanso zolakwika zochepa.
Kafukufuku: Kuyika kwa diamondi pamalo okhazikika pogwiritsa ntchito FeCoB yokhala ndi chithunzi chojambula.Ngongole yazithunzi: Bjorn Wilezic/Shutterstock.com
Kupyolera mu njira yogawanitsa dziko lolimba, mafilimu a FeCoB nanocrystalline (Fe:Co:B=60:20:20, chiŵerengero cha atomiki) amatha kukwaniritsa kulunjika kwa lattice ndikuchotsa diamondi mu microstructure.
Ma diamondi ali ndi mawonekedwe apadera a biochemical ndi zowoneka, komanso kutsika kwambiri komanso mphamvu.Kukhazikika kwake kopitilira muyeso ndikomwe gwero lofunikira lakupita patsogolo kwaukadaulo wopitilira muyeso (ukadaulo wotembenuza diamondi) komanso njira yopitira ku zipsinjo zazikulu mumitundu yambiri ya GPa.
Kusasunthika kwa Chemical, kukhalitsa kowoneka ndi zochitika zachilengedwe kumawonjezera mwayi wamapangidwe a machitidwe omwe amagwiritsa ntchito izi.Daimondi yadzipangira dzina lokha pankhani ya mechatronics, optics, sensors ndi data management.
Kuti agwiritse ntchito, kulumikizana kwa diamondi ndi mawonekedwe ake kumabweretsa zovuta zowonekera.Reactive ion etching (RIE), plasma yophatikizana mochititsa chidwi (ICP), ndi etching yopangidwa ndi ma elekitironi ndi zitsanzo zamakina omwe alipo omwe amagwiritsa ntchito njira zama etching (EBIE).
Mapangidwe a diamondi amapangidwanso pogwiritsa ntchito njira zopangira laser ndi focused ion beam (FIB).Cholinga cha njira yopangira izi ndikufulumizitsa delamination komanso kulola kukulitsa madera akuluakulu pamapangidwe otsatizana.Njirazi zimagwiritsa ntchito ma etchants amadzimadzi (madzi amadzimadzi, mipweya, ndi njira zamadzimadzi), zomwe zimachepetsa zovuta za geometric zomwe zingatheke.
Ntchito yochititsa chidwiyi imaphunzira kuchotsedwa kwa zinthu ndi mpweya wopangidwa ndi mankhwala ndikupanga diamondi ya polycrystalline yokhala ndi FeCoB (Fe:Co:B, 60:20:20 peresenti ya atomiki) pamtunda.Chisamaliro chachikulu chimaperekedwa pakupanga mitundu ya TM yokhomerera molondola zamitundu yamamita mu diamondi.Daimondi yomwe ili pansi imamangiriridwa ku nanocrystalline FeCoB ndi chithandizo cha kutentha pa 700 mpaka 900 ° C kwa mphindi 30 mpaka 90.
Chosanjikiza chosasunthika chachitsanzo cha diamondi chikuwonetsa mawonekedwe apansi a polycrystalline microstructure.The roughness (Ra) mkati aliyense tinthu makamaka anali 3.84 ± 0.47 nm, ndi okwana pamwamba roughness anali 9.6 ± 1.2 nm.Kukakala (mkati mwa njere imodzi ya diamondi) ya chitsulo chosanjikiza cha FeCoB ndi 3.39 ± 0.26 nm, ndipo kutalika kwake ndi 100 ± 10 nm.
Pambuyo annealing pa 800 ° C kwa 30 min, zitsulo pamwamba makulidwe anakula mpaka 600 ± 100 nm, ndi roughness pamwamba (Ra) kuchuluka kwa 224 ± 22 nm.Pa annealing, maatomu a carbon amafalikira mu FeCoB wosanjikiza, zomwe zimapangitsa kuti kukula kwake kuchuluke.
Zitsanzo zitatu zokhala ndi zigawo za FeCoB 100 nm wandiweyani zidatenthedwa pa kutentha kwa 700, 800, ndi 900 ° C, motsatana.Pamene kutentha kuli pansi pa 700 ° C, palibe mgwirizano waukulu pakati pa diamondi ndi FeCoB, ndipo zinthu zochepa kwambiri zimachotsedwa pambuyo pa chithandizo cha hydrothermal.Kuchotsa zinthu kumakulitsidwa mpaka kutentha pamwamba pa 800 ° C.
Pamene kutentha kunafika pa 900 ° C, mlingo wa etching unawonjezeka kawiri poyerekeza ndi kutentha kwa 800 ° C.Komabe, mbiri ya chigawo chokhazikitsidwa ndi yosiyana kwambiri ndi ma etch sequences (FeCoB).
Mawonekedwe owoneka bwino amtundu wokhazikika kuti apange mawonekedwe: Kusankha kokhazikika kwa diamondi pogwiritsa ntchito mawonekedwe a FeCoB.Ngongole yazithunzi: Van Z. ndi Shankar MR et al., Diamondi ndi Zida Zogwirizana.
Zitsanzo za FeCoB 100 nm wandiweyani pa diamondi zidakonzedwa pa 800 ° C kwa mphindi 30, 60, ndi 90, motsatana.
Kuvuta (Ra) kwa malo ojambulidwa kunatsimikiziridwa ngati ntchito ya nthawi yoyankha pa 800 ° C.Kuuma kwa zitsanzo pambuyo annealing kwa 30, 60 ndi 90 mphindi anali 186 ± 28 nm, 203 ± 26 nm ndi 212 ± 30 nm, motero.Ndi kuya kwa 500, 800, kapena 100 nm, chiŵerengero (RD) cha roughness ya malo ojambulidwa mpaka kuya kwa etch ndi 0.372, 0.254, ndi 0.212, motero.
Kuuma kwa malo okhazikika sikuwonjezeka kwambiri ndi kuwonjezereka kwakuya kwa etching.Zapezeka kuti kutentha kofunikira pakuchitapo pakati pa diamondi ndi HM etchant kumapitilira 700°C.
Zotsatira za kafukufukuyu zikuwonetsa kuti FeCoB imatha kuchotsa diamondi mwachangu kwambiri kuposa Fe kapena Co yokha.
Nthawi yotumiza: Aug-31-2023