Kusiyana pakati pa chandamale cha electroplating ndi chandamale cha sputtering

Ndi kuwongolera kwa moyo wa anthu komanso chitukuko chosalekeza cha sayansi ndi ukadaulo, anthu ali ndi zofunikira zapamwamba komanso zapamwamba pakuchita zinthu zosavala, zosagwira dzimbiri komanso zokometsera zokometsera kwambiri.Zoonadi, zokutira zimathanso kukongoletsa mtundu wa zinthu izi.Ndiye, pali kusiyana kotani pakati pa chithandizo cha electroplating target ndi sputtering target?Lolani akatswiri ochokera ku Dipatimenti ya Zamakono ya RSM akufotokozereni izi.

　　Electroplating chandamale

Mfundo ya electroplating imagwirizana ndi mkuwa woyenga electrolytic.Pamene electroplating, electrolyte okhala ndi ayoni zitsulo za plating wosanjikiza zambiri ntchito kukonzekera plating njira;Kumiza zitsulo mankhwala kuti yokutidwa mu plating njira ndi kulumikiza izo ndi elekitirodi zoipa wa magetsi DC monga cathode;Chitsulo chophimbidwa chimagwiritsidwa ntchito ngati anode ndikulumikizidwa ndi electrode yabwino yamagetsi a DC.Pamene magetsi otsika a DC akugwiritsidwa ntchito, chitsulo cha anode chimasungunuka mu yankho ndikukhala cation ndikusunthira ku cathode.Ma ions awa amapeza ma electron pa cathode ndipo amachepetsedwa kukhala zitsulo, zomwe zimakutidwa pazitsulo zomwe zimayikidwa.

　　Sputtering Target

Mfundoyi ndi yogwiritsa ntchito kutulutsa kowala kuphulitsa ma argon ayoni pamalo omwe mukufuna, ndipo maatomu a chandamale amatulutsidwa ndikuyikidwa pagawo laling'ono kuti apange filimu yopyapyala.Mawonekedwe ndi kufanana kwa makanema otayidwa ndiabwino kuposa amafilimu osungidwa ndi nthunzi, koma liwiro loyika ndi locheperako kuposa la makanema osungidwa ndi nthunzi.Zatsopano sputtering zida pafupifupi amagwiritsa ntchito maginito amphamvu kuti ma elekitironi ozungulira kuti imathandizira ionization wa argon kuzungulira chandamale, amene kumawonjezera Mwina kugunda pakati chandamale ndi ayoni argon ndi bwino sputtering mlingo.Makanema ambiri omata zitsulo ndi DC sputtering, pomwe zinthu zosagwiritsa ntchito maginito za ceramic ndi RF AC sputtering.Mfundo yayikulu ndikugwiritsa ntchito kutulutsa kowala mu vacuum kuphulitsa chandamale ndi ma argon ions.Ma cations mu plasma adzathamanga kuti athamangire kumalo olakwika a elekitirodi ngati zinthu zotayidwa.Kuphulika kumeneku kupangitsa kuti zinthu zomwe mukufuna kuzichita ziwuluke ndikuyika pansi kuti mupange filimu yopyapyala.

　　Zosankha za zinthu zomwe mukufuna

(1) Cholingacho chiyenera kukhala ndi mphamvu zamakina abwino ndi kukhazikika kwa mankhwala pambuyo popanga mafilimu;

(2) The filimu chuma kwa zotakasika sputtering filimu ayenera kukhala zosavuta kupanga pawiri filimu ndi anachita mpweya;

(3) Cholinga ndi gawo lapansi liyenera kusonkhanitsidwa molimba, mwinamwake, filimuyo yokhala ndi mphamvu yabwino yomangiriza ndi gawo lapansi idzatengedwa, ndipo filimu yapansi idzaphwanyidwa poyamba, ndiyeno filimu yofunikira iyenera kukonzedwa;

(4) Pamaziko okwaniritsa zofunikira za filimuyo, kusiyana kochepa pakati pa mphamvu yowonjezera kutentha kwa chandamale ndi gawo lapansi, ndibwino, kuti muchepetse mphamvu ya kutentha kwa filimu yotayika;

(5) Malinga ndi ntchito ndi zofunikira za filimuyo, cholinga chomwe chimagwiritsidwa ntchito chiyenera kukwaniritsa zofunikira zaukhondo, zonyansa, chigawo chimodzi, kulondola kwa makina, ndi zina zotero.