Kusiyana pakati pa zokutira za evaporation ndi zokutira za sputtering

Monga tonse tikudziwira, vacuum evaporation ndi ion sputtering amagwiritsidwa ntchito kwambiri popaka vacuum.Kodi pali kusiyana kotani pakati pa zokutira za evaporation ndi zokutira zotayira?Kenako, akatswiri aukadaulo ochokera ku RSM adzagawana nafe.

Vacuum evaporation ❖ kuyanika ndikutenthetsa zinthuzo kuti zisungunuke ku kutentha kwina mwa kutenthetsa kukana kapena chitsulo cha elekitironi ndi bomba la laser m'malo okhala ndi digiri ya vacuum ya osachepera 10-2Pa, kuti mphamvu yotenthetsera ya mamolekyu kapena matenthedwe. maatomu mu zinthu kuposa mphamvu kumanga padziko, kuti ambiri mamolekyu kapena maatomu nthunzi nthunzi kapena sublimate, ndipo mwachindunji precipitate pa gawo lapansi kupanga filimu.Kupaka kwa ion sputtering kumagwiritsa ntchito kuthamanga kwa ma ion abwino omwe amapangidwa ndi kutulutsa mpweya pansi pa mphamvu yamagetsi kuti aphulitse chandamale ngati cathode, kotero kuti maatomu kapena mamolekyu omwe ali mu chandamale amatha kuthawa ndikudutsa pamwamba pa chogwiriracho kuti apange. filimu yofunika.

Njira yomwe imagwiritsidwa ntchito kwambiri pakuphimba kwa vacuum evaporation ndikuwotcha kukana, komwe kuli ndi ubwino wa dongosolo losavuta, mtengo wotsika komanso ntchito yabwino;Choyipa chake ndi chakuti sichoyenera zitsulo zokanira komanso kutentha kwambiri kugonjetsedwa ndi dielectric zipangizo.Kutentha kwa ma elekitironi ndi kutentha kwa laser kumatha kuthana ndi zofooka za kukana kutentha.Potenthetsera mtengo wa ma elekitironi, mtengo wa elekitironi wolunjika umagwiritsidwa ntchito kutenthetsa mwachindunji zinthu zomwe zaphulitsidwa, ndipo mphamvu ya kinetic ya mtengo wa elekitironi imakhala mphamvu ya kutentha, yomwe imapangitsa kuti zinthuzo zisasunthike.Kutentha kwa laser kumagwiritsa ntchito laser yamphamvu kwambiri ngati gwero lotenthetsera, koma chifukwa cha kukwera mtengo kwa laser yamphamvu kwambiri, imatha kugwiritsidwa ntchito m'ma laboratories ochepa pakali pano.

Ukadaulo wa sputtering ndi wosiyana ndi ukadaulo wa vacuum evaporation."Sputtering" amatanthauza chodabwitsa chomwe tinthu tating'onoting'ono timawombera pamwamba (chofuna) ndikupanga maatomu olimba kapena mamolekyu akuwombera kuchokera pamwamba.Zambiri mwa tinthu tating'onoting'ono timene timatulutsa timakhala mu atomiki, yomwe nthawi zambiri imatchedwa maatomu ophulika.Tinthu tating'onoting'ono tomwe timagwiritsa ntchito kuphulitsa chandamale kumatha kukhala ma elekitironi, ma ion kapena tinthu tating'ono.Chifukwa ma ion ndi osavuta kuthamangitsa pansi pamagetsi kuti apeze mphamvu yamagetsi yofunikira, ambiri aiwo amagwiritsa ntchito ayoni ngati tinthu tating'onoting'ono.Njira yothirira imatengera kutulutsa kowala, ndiko kuti, ma ion a sputtering amachokera kutulutsa mpweya.Ukadaulo wosiyanasiyana wa sputtering umagwiritsa ntchito mitundu yosiyanasiyana yotulutsa kuwala.DC diode sputtering imagwiritsa ntchito kutulutsa kowala kwa DC;Triode sputtering ndi kutulutsa kowala komwe kumathandizidwa ndi cathode yotentha;RF sputtering imagwiritsa ntchito kutulutsa kowala kwa RF;Magnetron sputtering ndi kutulutsa kowala komwe kumayendetsedwa ndi maginito a annular.

Poyerekeza ndi zokutira za vacuum evaporation, kupaka utoto kumakhala ndi zabwino zambiri.Mwachitsanzo, chinthu chilichonse chikhoza kutayidwa, makamaka zinthu ndi mankhwala okhala ndi malo osungunuka kwambiri komanso kutsika kwa nthunzi;Kulumikizana pakati pa filimu yotayidwa ndi gawo lapansi ndikwabwino;Kuchuluka kwa mafilimu;Makulidwe a kanema amatha kuyendetsedwa ndipo kubwereza ndikwabwino.Choyipa chake ndi chakuti zidazo ndizovuta ndipo zimafuna zida zamphamvu kwambiri.

Kuphatikiza apo, kuphatikiza kwa njira ya evaporation ndi njira ya sputtering ndi plating ya ion.Ubwino wa njirayi ndikuti filimu yomwe yapezedwa imakhala yomatira mwamphamvu ndi gawo lapansi, kutsika kwakukulu komanso kuchulukitsitsa kwamafilimu.