Cholingacho chimakhala ndi zotsatira zambiri, ndipo malo opititsa patsogolo msika ndi aakulu.Ndizothandiza kwambiri m'magawo ambiri.Pafupifupi zida zonse zatsopano za sputtering zimagwiritsa ntchito maginito amphamvu kuti ma elekitironi azizungulira kuti apititse patsogolo ionization ya argon kuzungulira chandamale, zomwe zimapangitsa kuti pakhale mwayi wogundana pakati pa chandamale ndi ayoni argon.Tsopano tiyeni tione ntchito ya sputtering chandamale mu zokutira vacuum.
Wonjezerani kuchuluka kwa sputtering.Nthawi zambiri, sputtering ya DC imagwiritsidwa ntchito popaka zitsulo, pomwe RF AC sputtering imagwiritsidwa ntchito pazinthu zopanda maginito za ceramic.Mfundo yofunika kwambiri ndikugwiritsa ntchito ma ion a argon (AR) pamwamba pa chandamale mu vacuum, ndipo ma cations mu plasma amathamanga kuti athamangire pamalo olakwika a electrode ngati zinthu zotayidwa.Izi zipangitsa kuti zinthu zomwe mukufunazo ziwuluke ndikuziyika pagawo laling'ono kuti mupange filimu.
Nthawi zambiri, pali zinthu zingapo zokutira filimu pogwiritsa ntchito sputtering: (1) chitsulo, alloy kapena insulator akhoza kupangidwa kukhala deta ya filimu.
(2) Pansi pamikhalidwe yoyenera, filimuyo yokhala ndi mawonekedwe omwewo imatha kupangidwa kuchokera pazolinga zingapo komanso zosokoneza.
(3) Kusakaniza kapena kuphatikizika kwa zinthu zomwe chandamale ndi mamolekyu a gasi amatha kupangidwa powonjezera mpweya kapena mpweya wina wokhazikika mumlengalenga.
(4) Cholowera chandamale chapano ndi nthawi ya sputtering zitha kuwongoleredwa, ndipo ndikosavuta kupeza makulidwe apamwamba kwambiri afilimu.
(5) Poyerekeza ndi njira zina, ndizothandiza kupanga mafilimu amtundu waukulu.
(6) Tinthu tating'onoting'ono tating'ono tating'ono sitikhudzidwa ndi mphamvu yokoka, ndipo malo a chandamale ndi gawo lapansi amatha kukonzedwa momasuka.
Nthawi yotumiza: May-17-2022