Chidziwitso chokonzekera cha sputtering chandamale

Abwenzi ambiri okhudza kukonza chandamale pali mafunso ochulukirapo kapena ochepa, posachedwapa palinso makasitomala ambiri omwe akukambirana za kukonza mavuto omwe akulimbana nawo, tiyeni mkonzi wa RSM kuti tigawane nawo za sputtering chandamale yokonza chidziwitso.

　　Kodi zolinga za sputter ziyenera kusungidwa bwanji?

　　1, Kukonzekera kwa zolinga

Pofuna kupewa kuzungulira kwachidule komanso kutsekeka komwe kumachitika chifukwa cha zodetsa zodetsa m'miyendo, ndikofunikira kuchotsa nthawi ndi nthawi ma sputters omwe amasonkhanitsidwa pakati ndi mbali zonse ziwiri za njanji, zomwe zimathandizanso ogwiritsa ntchito kuti aziwombera mosalekeza pakuchulukira mphamvu.

　　2, Kusungirako chandamale

Tikukulimbikitsani kuti ogwiritsa ntchito asunge chandamale (kaya chitsulo kapena ceramic) muzopaka za vacuum, makamaka chandamale yoyenera isungidwe mu vacuum kuletsa makutidwe ndi okosijeni a wosanjikiza woyenerera kuti asasokoneze mtundu wake.Ponena za kulongedza kwazitsulo zazitsulo, tikulangiza kuti ziyenera kuikidwa m'matumba apulasitiki oyera osachepera.

　　3, Kuyeretsa chandamale

Gawo loyamba ndikutsuka ndi nsalu yofewa yopanda lint yoviikidwa mu acetone;

Gawo lachiwiri likufanana ndi sitepe yoyamba, kuyeretsa ndi mowa;

Khwerero 3: yeretsani ndi madzi a deionized.Pambuyo poyeretsa ndi madzi osakanizidwa, cholingacho chimayikidwa mu uvuni ndikuwumitsa pa 100 ℃ kwa mphindi 30.Amalangizidwa kuti agwiritse ntchito "nsalu yaulere" kuyeretsa oxide ndi zida za ceramic.

Gawo lachinayi ndikutsuka chandamale ndi argon ndi kuthamanga kwambiri komanso chinyezi chochepa kuti muchotse tinthu tating'ono tomwe timayambitsa arc mu dongosolo la sputtering.

　　4 、 Kuzungulira kwakanthawi komanso kumangika cheke

Pambuyo poika chandamale, cathode yonse iyenera kufufuzidwa kuti ikhale yochepa komanso yolimba.Ndikoyenera kuweruza ngati pali dera lalifupi mu cathode pogwiritsa ntchito mita yotsutsa ndi megger.Pambuyo potsimikizira kuti palibe dera lalifupi mu cathode, kuyang'ana kwa kutuluka kwa madzi kungathe kuchitidwa, ndipo madzi akhoza kulowetsedwa mu cathode kuti adziwe ngati pali kutuluka kwa madzi.

　　5. Kuyika ndi zoyendera

Zolinga zonse zimapakidwa m'matumba apulasitiki otsekedwa ndi vacuum okhala ndi zoteteza chinyezi.Phukusi lakunja nthawi zambiri limakhala bokosi lamatabwa lokhala ndi anti-collision wosanjikiza kuzungulira kuti ateteze chandamale ndi ndege yakumbuyo kuti isawonongeke panthawi yamayendedwe ndi posungira.