Mfundo yokutira vacuum

Kupaka vacuum kumatanthawuza kutenthetsa ndi kutulutsa mpweya wotuluka mu vacuum kapena sputtering ndi bombardment yothamanga ya ayoni, ndikuyiyika pamwamba pa gawo lapansi kuti ipange filimu yakusanjikiza kamodzi kapena magawo angapo.Mfundo ya vacuum yokutira ndi chiyani?Kenako, mkonzi wa RSM adzatidziwitsa.

　　1. Chophimba cha vacuum evaporation

Kupaka kwa evaporation kumafuna kuti mtunda wapakati pa mamolekyu a nthunzi kapena maatomu kuchokera ku gwero la nthunzi ndi gawo lapansi loti litakutidwe liyenera kukhala lochepera panjira yaulere ya mamolekyu a gasi otsalira mu chipinda chophikira, kuti awonetsetse kuti mamolekyu a nthunzi a mpweya wotsalira. evaporation imatha kufika pamwamba pa gawo lapansi popanda kugunda.Onetsetsani kuti filimuyo ndi yoyera komanso yolimba, ndipo evaporation sidzakhala oxidize.

　　2. Chophimba cha vacuum sputtering

Mu vacuum, pamene ma ion othamanga amawombana ndi olimba, mbali imodzi, kristaloyo imawonongeka, kumbali ina, imawombana ndi maatomu omwe amapanga kristalo, ndipo pamapeto pake maatomu kapena mamolekyu pamwamba pa olimba. kuwaza kunja.Zinthu zotayidwa zimakutidwa pagawolo kuti apange filimu yopyapyala, yomwe imatchedwa vacuum sputter plating.Pali njira zambiri zotayira, zomwe mwa iwo diode sputtering ndiye woyamba.Malinga ndi zolinga zosiyanasiyana za cathode, zikhoza kugawidwa mu Direct current (DC) ndi ma frequency apamwamba (RF).Kuchuluka kwa ma atomu omwe amaphwanyidwa pokhudza chandamale ndi ayoni amatchedwa sputtering rate.Ndi mkulu sputtering mlingo, filimu mapangidwe liwiro mofulumira.Mlingo wa sputtering umagwirizana ndi mphamvu ndi mtundu wa ayoni ndi mtundu wa zinthu zomwe mukufuna.Nthawi zambiri, kutulutsa kwamphamvu kumawonjezeka ndi kuchuluka kwa mphamvu ya ma ion aumunthu, ndipo kutulutsa kwazitsulo zamtengo wapatali kumakwera kwambiri.