Ikhoza kugawidwa mu DC magnetron sputtering ndi RF magnetron sputtering.
Njira ya DC sputtering imafuna kuti chandamalecho chikhoza kusamutsa ndalama zabwino zomwe zimatengedwa kuchokera ku bombardment ya ion kupita ku cathode yoyandikana nayo, ndiyeno njira iyi imatha kusokoneza deta ya conductor, yomwe siili yoyenera kwa deta yotsekemera, chifukwa mtengo wa ion pamtunda sungathe kuchepetsedwa powombera chandamale cha kutchinjiriza, zomwe zingapangitse kuwonjezeka kwa zomwe zingatheke pamtunda wa chandamale, ndipo pafupifupi magetsi onse omwe amagwiritsidwa ntchito amagwiritsidwa ntchito pa chandamale, kotero mwayi wa ion mathamangitsidwe ndi ionization pakati pawo. mizati iwiri adzakhala yafupika, kapena ngakhale sangathe ionized, Zimabweretsa kulephera mosalekeza kumaliseche, ngakhale kumaliseche kusokoneza ndi sputtering kusokonezedwa.Chifukwa chake, ma radio frequency sputtering (RF) amayenera kugwiritsidwa ntchito potchingira zolinga kapena zosagwirizana ndi zitsulo zomwe sizikuyenda bwino.
Njira ya sputtering imaphatikizapo njira zobalalitsa zovuta komanso njira zosiyanasiyana zotumizira mphamvu: choyamba, tinthu tating'onoting'ono timagundana ndi maatomu omwe akuwunikira, ndipo gawo limodzi la mphamvu ya kinetic ya tinthu tating'onoting'ono timatumizidwa ku maatomu omwe akutsata.Mphamvu ya kinetic ya maatomu ena omwe amawatsata imaposa chotchinga chomwe chimapangidwa ndi maatomu ena ozungulira (5-10ev ya zitsulo), kenako amachotsedwa pamiyala ya lattice kuti apange ma atomu omwe sali pamalowo, Ndi kugundana mobwerezabwereza ndi maatomu oyandikana nawo. , zomwe zinayambitsa kugundana.Kugundana kumeneku kukafika pamwamba pa chandamale, ngati mphamvu ya kinetic ya maatomu omwe ali pafupi ndi pamwamba pa chandamale ndi yayikulu kuposa mphamvu yomangiriza pamwamba (1-6ev ya zitsulo), maatomuwa amasiyana ndi chandamale. ndi kulowa mu vacuum.
Kupaka sputtering ndi luso logwiritsa ntchito tinthu tating'onoting'ono tophulitsa pamwamba pa chandamale mu vacuum kuti tinthu tambiri tambiri tiwunjikane pa gawo lapansi.Nthawi zambiri, kutulutsa kwamphamvu kwa gasi wocheperako kumagwiritsidwa ntchito kupanga ma ion a zochitika.Chandamale cha cathode chimapangidwa ndi zida zokutira, gawo lapansi limagwiritsidwa ntchito ngati anode, 0.1-10pa argon kapena mpweya wina wa inert umalowetsedwa m'chipinda cholowera, ndipo kutulutsa kowala kumachitika pansi pa cathode (chandamale) 1-3kv DC yoyipa kwambiri. voteji kapena 13.56MHz RF voteji.Ma ionized argon ions amawombera pamwamba pa chandamalecho, kupangitsa maatomu omwe akuwafuna kuti azithimbirira ndikuwunjikana pagawo laling'ono kuti apange filimu yopyapyala.Pakalipano, pali njira zambiri zopopera, kuphatikizapo kupopera kwachiwiri, tertiary kapena quaternary sputtering, magnetron sputtering, target sputtering, RF sputtering, bias sputtering, asymmetric communication RF sputtering, sputtering ion mtengo ndi reactive.
Chifukwa maatomu ophulika amatuluka pambuyo pa kusinthanitsa mphamvu ya kinetic ndi ma ion abwino ndi makumi a mphamvu ya ma electron volts, maatomu otayika amakhala ndi mphamvu zambiri, zomwe zimathandiza kuti ma atomu azibalalitsa panthawi yotungidwa, kupititsa patsogolo kusanja bwino, kupanga. filimu yokonzekera imakhala ndi mgwirizano wamphamvu ndi gawo lapansi.
Pa sputtering, pambuyo mpweya ionized, ma ion mpweya kuwulukira chandamale cholumikizidwa ndi cathode pansi zochita za magetsi, ndi ma elekitironi kuwulukira kwa pansi khoma patsekeke ndi gawo lapansi.Mwanjira iyi, pansi pa voteji yotsika ndi kupanikizika kochepa, chiwerengero cha ayoni ndi chochepa ndipo mphamvu ya sputtering ya chandamale ndi yochepa;Pa voteji ndi kuthamanga kwambiri, ngakhale ma ion ambiri amatha kuchitika, ma elekitironi akuwulukira ku gawo lapansi amakhala ndi mphamvu zambiri, zomwe zimakhala zosavuta kutenthetsa gawo lapansi komanso ngakhale sputtering yachiwiri, zomwe zimakhudza filimuyo.Kuphatikiza apo, kuthekera kwa kugundana pakati pa maatomu omwe mukufuna ndi mamolekyu a gasi powulukira ku gawo lapansi kumawonjezekanso kwambiri.Choncho, idzabalalika pamimba yonse, zomwe sizidzangowononga chandamale, komanso kuipitsa gawo lililonse panthawi yokonzekera mafilimu ambiri.
Pofuna kuthetsa zofooka zomwe zili pamwambazi, teknoloji ya DC magnetron sputtering inakhazikitsidwa m'ma 1970.Imagonjetsa bwino zofooka za kutsika kwa cathode sputtering ndi kuwonjezeka kwa kutentha kwa gawo lapansi chifukwa cha ma elekitironi.Choncho, yapangidwa mofulumira komanso yogwiritsidwa ntchito kwambiri.
Mfundoyi ili motere: mu magnetron sputtering, chifukwa ma elekitironi osuntha amagonjetsedwa ndi mphamvu ya Lorentz mu mphamvu ya maginito, kayendedwe kawo kadzakhala kopweteka kapena kozungulira, ndipo njira yawo yoyenda idzakhala yaitali.Choncho, chiwerengero cha kugunda ndi mamolekyu ntchito mpweya chiwonjezeke, kuti kachulukidwe plasma ndi kuchuluka, ndiyeno magnetron sputtering mlingo kwambiri bwino, ndipo akhoza kugwira ntchito pansi m`munsi sputtering voteji ndi mavuto kuchepetsa chizolowezi filimu kuipitsa;Kumbali inayi, imapangitsanso mphamvu zama atomu zomwe zikuchitika pamtunda wa gawo lapansi, kotero kuti filimuyo ingakhale yabwino kwambiri.Panthawi imodzimodziyo, pamene ma electron omwe amataya mphamvu kupyolera mu kugunda kangapo amafika ku anode, amakhala ma electron otsika mphamvu, ndiyeno gawo lapansi silidzatenthedwa.Choncho, magnetron sputtering ali ndi ubwino wa "liwiro" ndi "kutentha kochepa".Kuipa kwa njira iyi ndikuti filimu ya insulator siyingakonzekere, ndipo mphamvu yamaginito yomwe imagwiritsidwa ntchito mu electrode ya magnetron idzachititsa kuti pakhale 20% - 30. %.
Nthawi yotumiza: May-16-2022