Cholingacho chili ndi ntchito zambiri komanso ntchito zambiri m'magawo ambiri.Zida zatsopano za sputtering pafupifupi zimagwiritsa ntchito maginito amphamvu kuti zipangitse ma electron kuti apititse patsogolo ionization ya argon kuzungulira chandamale, zomwe zimawonjezera mwayi wa kugunda pakati pa chandamale ndi ma argon ions,
Wonjezerani kuchuluka kwa sputtering.Nthawi zambiri, sputtering ya DC imagwiritsidwa ntchito popaka zitsulo, pomwe RF communication sputtering imagwiritsidwa ntchito pazinthu zopanda maginito za ceramic.Mfundo yayikulu ndikugwiritsa ntchito ma ion a argon (AR) pamwamba pa chandamale mu vacuum, ndipo ma cations mu plasma amathamangira kumtunda wa electrode ngati zinthu zotayidwa.Izi zipangitsa kuti zinthu zomwe mukufunazo ziwuluke ndikuziyika pagawo laling'ono kuti mupange filimu.
Mwambiri, pali zinthu zingapo zokutira filimu pogwiritsa ntchito sputtering:
(1) Chitsulo, aloyi kapena insulator ikhoza kupangidwa kukhala filimu yopyapyala.
(2) Pansi pamikhalidwe yoyenera, filimuyo yokhala ndi mawonekedwe omwewo imatha kupangidwa kuchokera pazolinga zingapo komanso zosokoneza.
(3) Kusakaniza kapena kuphatikizika kwa zinthu zomwe chandamale ndi mamolekyu a gasi kumatha kupangidwa powonjezera mpweya kapena mpweya wina wokhazikika mumlengalenga.
(4) Cholowera chandamale chapano ndi nthawi ya sputtering zitha kuwongoleredwa, ndipo ndikosavuta kupeza makulidwe apamwamba kwambiri afilimu.
(5) Zimapindulitsa kupanga mafilimu ena.
(6) Tinthu tating'onoting'ono tating'onoting'ono sitikhudzidwa ndi mphamvu yokoka, ndipo chandamale ndi gawo lapansi zitha kukonzedwa momasuka.
Nthawi yotumiza: May-24-2022