Filimu yopyapyala pa chandamale chophimbidwa ndi mawonekedwe apadera akuthupi.Kumbali yeniyeni ya makulidwe, sikelo ndi yaying'ono kwambiri, yomwe ndi kuchuluka koyezeka kocheperako.Kuphatikiza apo, chifukwa cha mawonekedwe ndi mawonekedwe a makulidwe a filimu, kupitilira kwazinthu kumatha, zomwe zimapangitsa kuti deta ya filimuyo ndi deta yandandale ikhale ndi katundu wofanana. mfundo ndi luso la zokutira sputtering.
一、 Mfundo yopaka utoto
Luso lopaka utoto ndikugwiritsa ntchito mawonekedwe a ion shelling chandamale, maatomu omwe akuwunikira amakhudzidwa ndi zomwe zimadziwika kuti sputtering.Ma atomu omwe amayikidwa pamwamba pa gawo lapansi amatchedwa sputtering coating. Nthawi zambiri, ionization ya gasi imapangidwa ndi kutulutsa mpweya, ndipo ma ion abwino amawombera chandamale cha cathode pa liwiro lalikulu pansi pakuchita kwa magetsi, ndikukantha ma atomu kapena mamolekyu. cathode chandamale, ndi kuwuluka pamwamba pa gawo lapansi kuti asungidwe mu film.Kulankhula Mwachidule, sputtering ❖ kuyanika amagwiritsa otsika kuthamanga inert mpweya kutulutsa kuwala kutulutsa ayoni.
Nthawi zambiri, zida zopangira filimu zotayira zimakhala ndi maelekitirodi awiri muchipinda chotulutsira vacuum, ndipo chandamale cha cathode chimapangidwa ndi data yokutira.Chipinda cha vacuum chimadzazidwa ndi mpweya wa argon wokhala ndi mphamvu ya 0.1 ~ 10Pa.Kutulutsa kowala kumachitika pa cathode pansi pa mphamvu yamphamvu yoyipa ya 1 ~ 3kV dc kapena rf voltage ya 13.56mhz. Maion a Argon amaphulitsa chandamale ndikupangitsa kuti maatomu omwe aphulitsidwawo aunjikane pagawo.
二、 Makhalidwe a luso lopaka utoto
1, Fast stacking liwiro
Kusiyana pakati pa liwiro lalikulu la magnetron sputtering elekitirodi ndi ma elekitirodi amtundu wa siteji awiri ndikuti maginito amakonzedwa pansi pa chandamale, kotero kuti kutsekedwa kosafanana kwa maginito kumachitika pamwamba pa chandamale. wa heterogeneous magnetic field.Chifukwa cha kuwunikira kwambiri, ma electron amathawa pang'ono.The heterogeneous maginito akuzungulira chandamale pamwamba, ndi ma elekitironi yachiwiri anagwidwa heterogeneous maginito kugunda ndi mamolekyu mpweya mobwerezabwereza, amene bwino mkulu kutembenuka mlingo wa mamolekyu mpweya. atha kupeza ❖ kuyanika bwino, ndi makhalidwe abwino kutulutsa.
2, Kutentha kwa gawo lapansi ndikotsika
Kuthamanga kwambiri kwa magnetron sputtering, komwe kumatchedwanso kutentha kwapansi.Chifukwa chake ndikuti chipangizocho chimagwiritsa ntchito zotulutsa m'malo amagetsi amagetsi omwe amawongoka wina ndi mnzake.Ma electron achiwiri omwe amapezeka kunja kwa chandamale, wina ndi mzake.Pansi pa zochita za malo owongoka amagetsi, amamangidwa pafupi ndi chandamale cha chandamalecho ndikuyenda pamsewu wopita kumtunda wozungulira, ndikugogoda mobwerezabwereza ma molekyulu a mpweya kuti ionize mamolekyu a mpweya. tokhala mobwerezabwereza, mpaka mphamvu zawo pafupifupi kutayika kwathunthu asanatuluke pamwamba pa chandamale pafupi ndi gawo lapansi.Chifukwa mphamvu ya ma elekitironi ndi yochepa kwambiri, kutentha kwa chandamale sikukwera kwambiri.Ndikokwanira kuthana ndi kutentha kwa gawo lapansi komwe kumachitika chifukwa cha kuphulika kwa ma elekitironi amphamvu kwambiri pakuwombera wamba kwa diode, komwe kumamaliza cryogenization.
3, Mitundu yosiyanasiyana ya nembanemba
Kapangidwe ka mafilimu opyapyala opangidwa ndi vacuum evaporation ndi jekeseni ndi yosiyana kwambiri ndi yomwe imapezeka pakupatulira zolimba zambiri.Mosiyana ndi zolimba zomwe zimakhalapo nthawi zambiri, zomwe zimayikidwa kuti zikhale zofanana m'miyeso itatu, mafilimu omwe amaikidwa mu gawo la gasi amagawidwa ngati zinthu zosiyana.Kukula kwa filimuyi kumayambitsidwa ndi mawonekedwe owoneka bwino a gawo lapansi ndi mithunzi yochepa m'malo odziwika a gawo lapansi.Komabe, mawonekedwe ndi kukula kwa mzati ndizosiyana kwambiri chifukwa cha kutentha kwa gawo lapansi, kubalalitsidwa padziko lapansi kwa ma atomu odzaza, kuikidwa m'manda kwa maatomu osadetsedwa ndi zochitika za Atomu zomwe zimachitika ku gawo lapansi.M'malo otentha kwambiri, filimu yopyapyala imakhala ndi mawonekedwe a fibrous, kachulukidwe kakang'ono, kamene kamapangidwa ndi makristasi abwino kwambiri, omwe ndi mawonekedwe apadera a filimu ya sputtering.
Kuthamanga kwa sputtering ndi kuthamanga kwa filimu kumakhudzanso mapangidwe a filimuyo.Chifukwa mamolekyu gasi ndi zotsatira kupondereza kubalalika kwa maatomu padziko gawo lapansi, zotsatira za kuthamanga sputtering ndi oyenera gawo lapansi kutentha dontho la chitsanzo.Chifukwa chake, mafilimu a porous okhala ndi njere zabwino atha kupezedwa pamphamvu ya sputtering.Kanema kakang'ono kameneka kameneka ndi koyenera kuthira mafuta, kuvala kukana, kuumitsa pamwamba ndi ntchito zina zamakina.
4, Konzani zolemba mofanana
Zosakaniza, zosakaniza, zosakaniza, ndi zina zotero, zomwe zimakhala zovuta kuti zikhale zovuta kuti zikutidwe ndi mpweya wa vacuum chifukwa mphamvu ya nthunzi ya zigawozo ndi yosiyana kapena chifukwa imasiyanitsa pamene imatenthedwa. ku gawo lapansi, m'lingaliro ili ndi luso langwiro lopanga mafilimu.Mitundu yonse yazinthu zitha kugwiritsidwa ntchito popanga zokutira zamafakitale ndi sputtering.
Nthawi yotumiza: Apr-29-2022