Kodi cholinga cha polysilicon ndi chiyani

Polysilicon ndichinthu chofunikira kwambiri chopangira sputtering.Kugwiritsa ntchito magnetron sputtering njira kukonzekera SiO2 ndi mafilimu ena woonda akhoza kupanga masanjidwewo zakuthupi kukhala bwino kuwala, dielectric ndi dzimbiri kukana, amene chimagwiritsidwa ntchito pa touchscreen, kuwala ndi mafakitale ena.

Njira yopangira makhiristo aatali ndikuzindikira kulimba kwa silicon yamadzimadzi kuchokera pansi mpaka pamwamba pang'onopang'ono powongolera kutentha kwa chotenthetsera m'malo otentha a ng'anjo ya ingot ndi kutayika kwa kutentha kwa zinthu zotenthetsera, ndi kulimbitsa makhiristo aatali liwiro ndi 0.8 ~ 1.2cm / h.Panthawi imodzimodziyo, mu ndondomeko yokhazikika yokhazikika, kugawanika kwa zinthu zachitsulo muzinthu za silicon kumatha kuzindikirika, zinthu zambiri zachitsulo zimatha kuyeretsedwa, ndipo mawonekedwe a yunifolomu a polycrystalline silicon angapangidwe.

Kuponyera polysilicon kumafunikanso kuchitidwa mwadala popanga, kuti asinthe kuchuluka kwa zonyansa zovomerezeka mu silicon kusungunuka.Dopant yayikulu ya p-type cast polysilicon pamsika ndi silicon boron master alloy, momwe boron zili pafupifupi 0.025%.Kuchuluka kwa doping kumatsimikiziridwa ndi chandamale cha resistivity ya silicon wafer.Kuthekera koyenera ndi 0.02 ~ 0.05 Ω • masentimita, ndipo ndende yofananira ya boron ndi pafupifupi 2 × 1014cm-3. ndiye, gawo la boron limagawidwa mu gradient mu njira yowongoka ya ingot, ndipo resistivity imachepa pang'onopang'ono kuchokera pansi mpaka pamwamba pa ingot.