Magnetron sputtering № ndi njira yatsopano yokutira nthunzi yakuthupi, poyerekeza ndi njira yopangira nthunzi yam'mbuyomo, ubwino wake muzinthu zambiri ndi wodabwitsa kwambiri.Monga teknoloji yokhwima, magnetron sputtering yagwiritsidwa ntchito m'madera ambiri.
Magnetron sputtering mfundo:
Mphamvu ya maginito ya orthogonal ndi magetsi amawonjezedwa pakati pa sputtered chandamale (cathode) ndi anode, ndipo mpweya wofunikira wa inert (nthawi zambiri Ar gas) umadzazidwa mu chipinda cha vacuum chapamwamba.Maginito okhazikika amapanga maginito a 250-350 gaus pamwamba pa zomwe akufuna, ndipo gawo la orthogonal electromagnetic field limapangidwa ndi magetsi apamwamba kwambiri.Pansi pa mphamvu ya magetsi, Ar gasi ionization mu ma ion abwino ndi ma elekitironi, chandamale ndipo ali ndi kukakamiza koyipa, kuchokera pa chandamale kuchokera pamtengo ndi mphamvu ya maginito ndi mphamvu yamagetsi yogwira ntchito, imapanga plasma yayikulu kwambiri pafupi ndi cathode, Ar ion pansi pa zochita za lorentz force, thamangani kuwulukira pamalo omwe mukufuna, kuphulitsa chandamale pamtunda waukulu, Ma atomu ophulika pa chandamale amatsata mfundo yosinthira mwachangu ndikuwulukira kutali ndi chandamale ndi kinetic yayikulu. mphamvu ku gawo lapansi loyika filimu.
Magnetron sputtering nthawi zambiri amagawidwa m'mitundu iwiri: DC sputtering ndi RF sputtering.Mfundo ya DC sputtering zida ndi yosavuta, ndipo mlingo wake ndi wofulumira pamene sputtering zitsulo.Kugwiritsidwa ntchito kwa RF sputtering ndikokulirapo, kuphatikiza kutulutsa zida zopangira zinthu, komanso kutayira zinthu zopanda ma conductive, komanso kutulutsa kokhazikika kwa ma oxides, nitrides ndi ma carbides ndi zida zina.Ngati ma frequency a RF akuwonjezeka, amakhala microwave plasma sputtering.Pakali pano, electron cyclotron resonance (ECR) mtundu wa microwave sputtering wa plasma amagwiritsidwa ntchito kwambiri.
Magnetron sputtering coating chandamale:
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Nthawi yotumiza: Aug-03-2022